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Photomask Fabrication Technology By Benjamin G. Eynon

Photomask Fabrication Technology

By Benjamin G. Eynon

  • Release Date: 2005-08-11
  • Genre: Engineering
  • $139.99
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Description

Photomasks, the printing masters for the fabrication of integrated circuits, have become a necessity of modern semiconductor manufacturing. This book details the science and technology of industrial photo mask production, including fundamental principles, industrial production flows, and technological evolution.

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